XY Linear System LT-100 with
ultra precision

With the development of the new Linear-Stage LT-100 Kunz precision has challenged a new dimension. The two-axis linear slide is equipped with the approved vacuum air-bearing technology and provides a low-noise movement and positioning accuracy in the range of ultra precision.



Due to a consequent construction, in the most possible compliance with the Abbe-principle, highest progression accuracies with smallest noise values up to a Nanometer can be realised.

The drive hereby is effected by Piezo motors. The high quality linear measuring systems are arranged directly below the slide, respectively below the test item, whereby error influences are mostly eliminated. Like this it is possible to achieve accuracies with the XY Linear System LT-100, which are usually only possible using expensive laser interferometer systems.



This two-axis Linear system is suitable for applications such as mask measuring machines, 2D-profile-, surface- and straightness measuring systems, as well as positioning systems and micro measuring machines. The length of the linear movements can be accommodated to customer’s requirements and is available between approx. 20 - 500 mm per axes.

Technical data Type XY Linear System LT-100 Dimensions 350 / 300/ 130 mm Weight 15 kg Travel X/Y 120 / 70 mm Straightness 0.3 µm / 50 mm Squareness 0.3 µm / 50 mm Flatness 0.1 µm / 50 x 50 mm Air bearing noise 0.01 µm Positioning accuracy 0.1 µm Repeatability 0.02 µm     Other dimensions and accuracies on request

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